High speed precision motion is required in applications rangjng from high performance machining to electronic packaging. To achieve tight performance requirement, careful design of the feedback and feedforward controllers is necessary. This paper presents the feedforward controller design for a high speed positioning system after a feedback controller has already been implemented. We adopt the control architecture that consists ofa nominal feedforward based on the approximate inverse of the identified linear model supplemented by an additive corrective control obtained based on iterative learning. Simulation and experimental results are included to demonstrate the efficacy of the proposed scheme.High speed precision motion is required in applications rangjng from high performance machining to electronic packaging. To achieve tight performance requirement, careful design of the feedback and feedforward controllers is necessary. This paper presents the feedforward controller design for a high speed positioning system after a feedback controller has already been implemented. We adopt the control architecture that consists of a nominal feedforward based on the approximate inverse of the identified linear model supplemented by an additive corrective control obtained based on iterative learning. Simulation and experimental results are included to demonstrate the efficacy of the proposed scheme.
American Control Conference, Boston, June 30-July 2, 2004.