Simulation, Microfabrication and Control of a Micro-Heater Array

This paper describes the simulation, fabrication, and
feedback control of a microheater array designed for the implementation
of real-time control during thermal evolution of microstructure.
The ten-channel heating array was designed through finite
element simulation and microfabricated to be compatible with in
situ imaging in a scanning electron microscope. Control algorithms
are implemented that demonstrate cooperative control of the temperature
(using calibrated Ti heater line resistances as a proxy)
across the set of channels in the array. The goal of this system is
to be able to generate controlled thermal, and thus microstructural,
and property distribution during processing of polycrystalline materials.