Precision motion is an indispensable part of microelectronic systems and their manufacturing, for example, read/write head motion in disk drives, chip placement motion in surface mount machines, laser drill motion in electronic packaging, scanning motion in confocal microscope, etc. Precision motion is also critical for micro-assembly and Micro-Electro-Mechanical-Systems (MEMS) actuation in applications to RF, micro-optic and micro-fluidic devices. With the continuing demand on high performance and low cost, the requirement on the motion subsystem, in terms of speed and precision, is also ever more stringent. Due to the high volume of data or parts these systems have to process, even a few percentage of throughput increase can have major economic impacts in terms of the overall system performance improvement and production cost saving.