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Dynamic Modeling and Open-Loop Control Of Thermal Bimorph MEMS Actuators

Reference:
D.O. Popa, B.H. Kang, J.T.Wen, H.E. Stephanou, G. Skidmore, A. Geisberger (2003). Dynamic Modeling and Open-Loop Control Of Thermal Bimorph MEMS Actuators.

2003 IEEE Conference on Robotics and Automation, Taipei, Taiwan, Sept, 2003.

Publication Type: 
Conference Articles