Dynamic Modeling and Open-Loop Control Of Thermal Bimorph MEMS Actuators

Reference
D.O. Popa, B.H. Kang, J.T.Wen, H.E. Stephanou, G. Skidmore, A. Geisberger (2003). Dynamic Modeling and Open-Loop Control Of Thermal Bimorph MEMS Actuators 2003 IEEE Conference on Robotics and Automation, Taipei, Taiwan, Sept, 2003.